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Continuous Production of Nanostructured Particles Using Spatial Atomic Layer Deposition

Continuous Production of Nanostructured Particles Using Spatial Atomic Layer Deposition, J. Ruud van Ommen, Dirkjan Kooijman, Mark de Niet, Mojgan Talebi, and Aristeidis Goulas. Journal of Vacuum Science & Technology a 2015, 33  (2), 021513.

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Abstract

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BibTeX

@article{ ISI:000355739500050,
Author = {van Ommen, J. Ruud and Kooijman, Dirkjan and de Niet, Mark and Talebi, Mojgan and Goulas, Aristeidis},
Title = {Continuous Production of Nanostructured Particles Using Spatial Atomic Layer Deposition},
Journal = {Journal of Vacuum Science \& Technology a},
Year = {2015},
Volume = {33},
Number = {2},
Month = {},
DOI = {10.1116/1.4905725},
Pages = {021513},
ISSN = {0734-2101},
EISSN = {1520-8559},
ResearcherID-Numbers = {van Ommen, Ruud/A-4119-2009},
ORCID-Numbers = {van Ommen, Ruud/0000-0001-7884-0323},
Times-Cited = {3},
Unique-ID = {ISI:000355739500050},
}

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