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Atomic and Molecular Layer Deposition: Off the Beaten Track

Atomic and Molecular Layer Deposition: Off the Beaten Track, H. Van Bui, F. Grillo, and J. R. van Ommen. Chemical Communications 2017, 53  (1), 45–71.

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Abstract

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BibTeX

@article{ ISI:000391607100003,
Author = {Van Bui, H. and Grillo, F. and van Ommen, J. R.},
Title = {Atomic and Molecular Layer Deposition: Off the Beaten Track},
Journal = {Chemical Communications},
Year = {2017},
Volume = {53},
Number = {1},
Pages = {45-71},
DOI = {10.1039/c6cc05568k},
ISSN = {1359-7345},
EISSN = {1364-548X},
ORCID-Numbers = {Van Bui, Hao/0000-0001-8460-1409},
Times-Cited = {1},
Unique-ID = {ISI:000391607100003},
}

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