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Simulation of Atomic Layer Deposition on Nanoparticle Agglomerates

Simulation of Atomic Layer Deposition on Nanoparticle Agglomerates, Wenjie Jin, Chris R. Kleijn, and J. Ruud van Ommen. Journal of Vacuum Science & Technology a 2017, 35  (1), 01B116.

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Abstract

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BibTeX

@article{ ISI:000392120900021,
Author = {Jin, Wenjie and Kleijn, Chris R. and van Ommen, J. Ruud},
Title = {Simulation of Atomic Layer Deposition on Nanoparticle Agglomerates},
Journal = {Journal of Vacuum Science \& Technology a},
Year = {2017},
Volume = {35},
Number = {1},
Month = {},
DOI = {10.1116/1.4968548},
Pages = {01B116},
ISSN = {0734-2101},
EISSN = {1520-8559},
Times-Cited = {0},
Unique-ID = {ISI:000392120900021},
}

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