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Recommended Reading List of Early Publications on Atomic Layer Deposition-Outcome of the “Virtual Project on the History of Ald”

Recommended Reading List of Early Publications on Atomic Layer Deposition-Outcome of the “Virtual Project on the History of Ald”, Esko Ahvenniemi, Andrew R. Akbashev, Saima Ali, Mikhael Bechelany, Maria Berdova, Stefan Boyadjiev, David C. Cameron, Rong Chen, Mikhail Chubarov, Veronique Cremers, Anjana Devi, Viktor Drozd, Liliya Elnikova, Gloria Gottardi, Kestutis Grigoras, Dennis M. Hausmann, Cheol Seong Hwang, Shih-Hui Jen, Tanja Kallio, Jaana Kanervo, Ivan Khmelnitskiy, Do Han Kim, Lev Klibanov, Yury Koshtyal, A. Outi I. Krause, Jakob Kuhs, Irina Kaerkkaenen, Marja-Leena Kaariainen, Tommi Kaariainen, Luca Lamagna, Adam A. Lapicki, Markku Leskela, Harri Lipsanen, Jussi Lyytinen, Anatoly Malkov, Anatoly Malygin, Abdelkader Mennad, Christian Militzer, Jyrki Molarius, Malgorzata Norek, Cagla Ozgit-Akgun, Mikhail Panov, Henrik Pedersen, Fabien Piallat, Georgi Popov, Riikka L. Puurunen, Geert Rampelberg, Robin H. A. Ras, Erwan Rauwel, Fred Roozeboom, Timo Sajavaara, Hossein Salami, Hele Savin, Nathanaelle Schneider, Thomas E. Seidel, Jonas Sundqvist, Dmitry B. Suyatin, Tobias Torndahl, J. Ruud van Ommen, Claudia Wiemer, Oili M. E. Ylivaara, and Oksana Yurkevich. Journal of Vacuum Science & Technology a 2017, 35  (1), 010801.

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@article{ ISI:000392120900050,
Author = {Ahvenniemi, Esko and Akbashev, Andrew R. and Ali, Saima and Bechelany, Mikhael and Berdova, Maria and Boyadjiev, Stefan and Cameron, David C. and Chen, Rong and Chubarov, Mikhail and Cremers, Veronique and Devi, Anjana and Drozd, Viktor and Elnikova, Liliya and Gottardi, Gloria and Grigoras, Kestutis and Hausmann, Dennis M. and Hwang, Cheol Seong and Jen, Shih-Hui and Kallio, Tanja and Kanervo, Jaana and Khmelnitskiy, Ivan and Kim, Do Han and Klibanov, Lev and Koshtyal, Yury and Krause, A. Outi I. and Kuhs, Jakob and Kaerkkaenen, Irina and Kaariainen, Marja-Leena and Kaariainen, Tommi and Lamagna, Luca and Lapicki, Adam A. and Leskela, Markku and Lipsanen, Harri and Lyytinen, Jussi and Malkov, Anatoly and Malygin, Anatoly and Mennad, Abdelkader and Militzer, Christian and Molarius, Jyrki and Norek, Malgorzata and Ozgit-Akgun, Cagla and Panov, Mikhail and Pedersen, Henrik and Piallat, Fabien and Popov, Georgi and Puurunen, Riikka L. and Rampelberg, Geert and Ras, Robin H. A. and Rauwel, Erwan and Roozeboom, Fred and Sajavaara, Timo and Salami, Hossein and Savin, Hele and Schneider, Nathanaelle and Seidel, Thomas E. and Sundqvist, Jonas and Suyatin, Dmitry B. and Torndahl, Tobias and van Ommen, J. Ruud and Wiemer, Claudia and Ylivaara, Oili M. E. and Yurkevich, Oksana},
Title = {Recommended Reading List of Early Publications on Atomic Layer Deposition-Outcome of the ``Virtual Project on the History of Ald{''}},
Journal = {Journal of Vacuum Science \& Technology a},
Year = {2017},
Volume = {35},
Number = {1},
Month = {},
DOI = {10.1116/1.4971389},
Pages = {010801},
ISSN = {0734-2101},
EISSN = {1520-8559},
ResearcherID-Numbers = {bechelany, mikhael/G-7556-2011 Savin, Hele/E-5155-2012 Lipsanen, Harri/C-4336-2013 Koshtyal, Yury/C-9531-2011 Pedersen, Henrik/E-1377-2012 Ras, Robin/F-7680-2010},
ORCID-Numbers = {bechelany, mikhael/0000-0002-2913-2846 Savin, Hele/0000-0003-3946-7727 Lipsanen, Harri/0000-0003-2487-4645 Koshtyal, Yury/0000-0002-1541-5351 Pedersen, Henrik/0000-0002-7171-5383 Ras, Robin/0000-0002-2076-242X},
Times-Cited = {0},
Unique-ID = {ISI:000392120900050},
}

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